This database is a list of elements and compounds we have initially compiled, which includes, for each material: (1) a list of the properties most relevant to MEMS and NEMS electrode design; (2) summaries of and links to reference information about the material, including its use in MEMS or NEMS switches.
This is a crowd-sourced project: we invite you to contribute additional information, links, and references with summaries. Please provide these by email to: carpick_at_seas.upenn.edu
1. Pure metals
- Platinum (Pt)
- Gold (Au)
- Rhodium (Rh)
- Ruthenium (Ru)
2. Oxides
3. Nitrides
4. Carbides
5. Silicides